Appeal No. 96-0377
Application 07/979,254
a metallic base plate having an opening defined
therein, said metallic base plate being grounded;
a reaction chamber disposed on said metallic base
plate;
a cylindrical outer electrode disposed around said
reaction chamber;
a high-frequency power supply connected to said
cylindrical outer electrode;
a cylindrical inner electrode disposed in said
reaction chamber coaxially with said cylindrical outer elec-
trode, said cylindrical inner electrode having a plurality of
inlet holes defined therein, said cylindrical inner electrode
having a lower end disposed in said opening and fixed to said
metallic base plate; and
an insulating plate covering an upper surface of
said metallic base plate.
The Examiner relies on the following references:
Steinberg et al. (Steinberg) 4,367,114 Jan. 4,
1983
Bersin et al. (Bersin) 5,099,100 Mar. 24, 1992
(filed Sept. 29, 1989)
Iwashiro 2 H1-095730 June 26, 1989
(Japanese Kokai)
2The Examiner and Appellants refer to this reference as
Ramco.
3
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