Appeal No. 1997-2209
Application No. 08/179,196
Accordingly, we cannot sustain the examiner’s rejection
of claims 17, 23, 26, 31, and 32 under the second paragraph of
35 U.S.C. § 112.
We next turn to the § 103 rejections. Urano discloses a
resist material comprising: (a) a polymer having a monomer
unit having a functional group which becomes alkali-soluble by
chemical change with heating under an atmosphere of an acid
generated from a photosensitive compound when exposed to
light, a monomer unit having a phenolic hydroxyl group, and,
if necessary, a third monomer unit; (b) a photosensitive
compound having high transmittance for light of near 248.4 nm
and capable of generating an acid by exposure to light or by
irradiation (photoacid generator); and (c) a solvent for
components (a) and (b)(column 3, lines 19-34). With respect
to Urano’s polymer (a) and the relative comonomer ratios, ten
variables (R , R , R , R , R , R , R , k’, p’, and m) are present1 2 3 4 5 6 7
for “picking and choosing” (column 2, line 40 to column 3,
line 8). The use of styrene as a third monomer is never
expressly mentioned (column 3, lines 54-60), much less a
copolymer having all three types of monomers in the specific
molar ratios as recited in the appealed claims.
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