Appeal No. 1997-3031
Application No. 08/411,509
pp. L106-L109.
Appealed claims 1 and 3 through 5 stand rejected under
35 U.S.C. § 103 as unpatentable over the admitted prior art in
view of DeLozanne and Sawa, further in view of Yokoyama and
Siegrist. Appealed claims 8 through 11 stand similarly
rejected
under the same section of the statute over the above
references, further in view of Berkley.
The subject matter on appeal is directed to a process for
preparing a film formed of an oxide material such as an oxide
superconductor thin film using a molecular beam epitaxy (MBE)
method and a reactive co-evaporation method. More
specifically, appellant's method forms a growing oxide
material on a substrate by supplying a molecular beam of
constituent atoms of the oxide excluding oxygen from a Knudsen
cell evaporation source and locally supplying in the vicinity
of the substrate an oxidizing gas of oxygen including about 70
volume percent ozone.
Further, according to the claimed process, the growing thin
oxide film is "illuminated by ultraviolet having a wavelength
3
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