Ex parte NAKAMURA - Page 8




          Appeal No. 1997-3031                                                        
          Application No. 08/411,509                                                  


          light having a wavelength of 200 nanometers or less produces a              
          different reaction with ozone and oxygen than does a process                
          using a UV wavelength of about 250 nanometers, as exemplified               
          by the examiner's prior art references.  See the brief at                   
          pages 14 and 15, the reply brief at pages 14 and 15 and the                 
          publication of Noyes, of record and attached to the appeal                  
          brief which arguably supports appellant's contentions.                      
               In light of the above, we reverse the examiner's stated                
          rejections of the herein appealed claims for obviousness.                   
                               NEW GROUND OF REJECTION                                
               We enter the following new ground of rejection pursuant                
          to 37 CFR § 1.196(b).                                                       
               The appealed claims are rejected under the first                       
          paragraph of 35 U.S.C. § 112, as failing to comply with the                 
          written description requirement of this section of the                      
          statute.  As discussed in our opinion above, a significant                  
          requirement of the appealed process involves the illumination               
          of a growing thin film by ultraviolet having a wavelength of                
          200 nanometers or less so as to increase the O content of the               
                                                        3                             
          oxidizing gas.  This claim language was introduced into claim               
          1 by an amendment filed on October 18, 1995.  Ipsis verbis                  
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