Appeal No. 1997-3515
Application No. 08/390,226
of the housing of an etching apparatus. However, the function
of these magnets is not to move a carriage or the like, but to
act upon high density areas of plasma to cause them to move
over the work piece in such a manner as to equalize their
effect thereon. It therefore is our view that Okano has
little relevance with regard to the structure set forth in
claim 1, and fails to overcome the deficiencies pointed out
above with regard to the teachings of the five references as
applied against claim 1.
Kemmerer pertains to rotating by magnetic means a planar
member upon which a plurality of wafers are mounted. Such
structure is not present in claims 1 or 5, and we therefore
see no applicability of the teachings of Kemmerer to these
claims.
For the reasons set forth above, we will not sustain the
rejection of dependent claim 5.
Claim 14 is dependent from claim 1 by way of claims 10
and 13. It recites a carrier magnet mounted on a planar
member (introduced in claim 13) and a rotational magnetic
drive unit located outside the housing to rotate the planar
13
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