Appeal No. 1997-3635
Application No. 08/498,357
14 similarly recites the steps of forming the barrier
metallization layer and in-situ forming a silicon layer
without exposing the barrier layer to oxygen. Accordingly, we
reverse the Examiner’s rejection of claims 1 through 3, 5, 8,
9, 11, 12, 14, 16, and 19 under 35 U.S.C. § 103 over Yu and
Japan '414.
In view of the forgoing, the decision of the Examiner
rejecting claims 1, 2, 4, 5, 9, 10, 12, 14, and 19 under
35 U.S.C. § 102 is affirmed. The decision of the Examiner
rejecting claims 1 through 3, 5, 8, 9, 11, 12, 14 through 16,
and 19 under 35 U.S.C. § 103 is reversed. The appeal for
rejection of claims 6, 7, 11, 17, 18, and 20 under 35 U.S.C.
§ 103 is dismissed. Accordingly, we affirm-in-part.
19
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