Appeal No. 1998-0425 Page 43
Application No. 08/272,527
25. Apparatus according to claim 24 wherein the flanges
exert down pressure on said elements by tightly clamping
O-ring seals against upward facing surfaces of the elements.
26. Apparatus according to claim 21 wherein the rings
are secured by internal thread on the rings to matingly
compatible threads on the outer surfaces of upstanding wall
means of the plenums.
27. Apparatus according to claim 1, 2, 3 or 4 wherein
the retaining means are rings located at and extending about
the element peripheries, which partly overlie said elements
for directly or indirectly placing down-pressure on said
elements at their peripheries and for securing the elements to
their respective plenums about their entire peripheries.
28. Apparatus according to claim 1, 2, 3 or 4 wherein
the respective elements have steps including upstanding sides
in the upper portions of their peripheries for receiving and
supporting sealing members.
29. Apparatus according to claim 1, 2, 3 or 4 including
sealing means comprising peripheral bands of elastomeric
material that extend about the sides of the elements.
30. Apparatus according to claim 1, 2, 3 or 4 wherein sealing
means of circular shape in plan view are positioned at the
peripheries of the elements for preventing escape of gas from
said diffusers except through said elements, the elements
respectively include upper gas discharge surfaces and
upstanding side walls, and the sealing means bear against said
side walls.
31. Apparatus according to claim 30 wherein the sealing
means are positioned at upper edges of said walls.
32. Apparatus according to claim 30 wherein the sealing
means are positioned at intersections of said side walls and
said gas discharge surfaces.
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