Appeal No. 1998-0425 Page 44
Application No. 08/272,527
33. Apparatus according to claim 30 wherein the sealing
means are of lesser height than the elements.
34. Apparatus according to claim 30 wherein the
upstanding side walls comprise, at least in part, walls of
steps located in the upper portions of the peripheral edges of
the elements, and the sealing means nest in said steps.
35. Apparatus according to claim 1, 2, 3 or 4 wherein
resilient, O-ring sealing members are positioned adjacent the
peripheries of the elements and in sealing contact with
portions of the respective plenums and elements.
36. Apparatus according to claim 1, 2, 3 or 4 wherein
the elements have upper and lower surfaces bounded by
peripheral sides, the plenums comprise gas-tight enclosures
that enclose said lower surfaces and that include upstanding
wall means facing and adjacent to said sides, the peripheries
of said elements and said upstanding wall means have
horizontal spacings between them, sealing means having bodies
of selected horizontal width are positioned within said
horizontal spacings, and the sealing means body widths are
larger than said spacings, whereby said bodies are held under
horizontal compression between the peripheral sides of the
elements and the upstanding wall means for preventing escape
of gas from said plenums except through said elements.
37. Apparatus according to claim 1, 2, 3 or 4 wherein a
sealing means of circular shape in plan view is positioned at
the periphery of the element for preventing escape of gas from
said plenum except through said element, and the plenum,
element and retaining means collectively contact the top,
bottom, inside and outside surfaces of the sealing means.
38. Apparatus according to claim 1, 2, 3 or 4 wherein
the elements have vertical sides that are enclosed by the
plenums, by resilient sealing means and by said retaining
means in gas-tight relationship with said plenums.
Page: Previous 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44
Last modified: November 3, 2007