Ex parte CHEN et al. - Page 7




                 Appeal No. 1997-3690                                                                                                                   
                 Application 08/427,163                                                                                                                 


                 (Fed. Cir. 1993).  Although an inventor is indeed free to                                                                              
                 define the specific terms used to describe his or her                                                                                  
                 invention, this must be done with reasonable clarity,                                                                                  
                 deliberateness, and precision.  In re Paulsen, 30 F.3d 1475,                                                                           
                 1480, 31 USPQ2d 1671, 1674 (Fed. Cir. 1994).                                                                                           
                          We note that Appellants' claim 1 simply recites                                                                               
                 "substrate".  The Random House College Dictionary, Revised                                                                             
                 Edition, 1982, definition of substrate is "a supporting                                                                                
                 material on which a circuit is formed or fabricated".   Thus                                   2                                       
                 the term substrate has broad meaning which does not preclude                                                                           
                 the interpretation that a substrate may include multilayers.                                                                           
                 Therefore we find that the Examiner's interpretation is proper                                                                         
                 and that Mizuno's layers 12 and 11 in which the titanium oxide                                                                         
                 material 15 is in direct contact with gate oxide film 12                                                                               
                 properly reads on Appellants claim language of forming a metal                                                                         
                 oxide layer over a portion of the substrate.                                                                                           
                          On pages 2 and 3 of the Reply Brief, Appellants further                                                                       
                 argue that the Examiner makes no pretense of finding the                                                                               
                 limitation of forming a metal oxide layer over the gate.  We                                                                           


                          2Copy provided.                                                                                                               
                                                                         -7-                                                                            





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