The opinion in support of the decision being entered was not written for
publication and is not binding precedent of the Board
Paper No. 18
UNITED STATES PATENT AND TRADEMARK OFFICE
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BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
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Ex parte JEFFREY STEWART
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Appeal No. 1998-0040
Application No. 08/068,753
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ON BRIEF
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Before WARREN, WALTZ and KRATZ, Administrative Patent Judges.
KRATZ, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on appeal from the examiner's final
rejection of claims 20-27, which are all of the claims pending
in this application.
BACKGROUND
Appellant's invention relates to a parylene deposition
system including a specified arrangement of a dimer
vaporization chamber and a pyrolysis chamber in a housing and
a selectively attachable/detachable deposition chamber module
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