Appeal No. 1998-0040 Page 2
Application No. 08/068,753
thereto. The deposition chamber module includes a base
cabinet and a deposition chamber attached to the base cabinet.
An understanding of the invention can be derived from a
reading of exemplary claim 20, which is reproduced in an
appendix attached to appellant’s brief.
The prior art references of record relied upon by the
examiner in rejecting the appealed claims are:
Gallego 4,592,306 Jun. 03,
1986
Wanlass 4,649,859 Mar. 17,
1987
Riley 4,683,143 Jul. 28,
1987
Takahashi et al. (Takahashi) 4,825,808 May
02, 1989 Rubin et al. (Rubin) 4,852,516
Aug. 01, 1989
Sakamoto et al. (Sakamoto) 1 59074629 Apr. 27, 1984
(published Japanese Kokai Patent Application)
1All references to Sakamoto in this decision are to the
English language translation thereof of record, a copy of
which is enclosed with the decision.
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