Appeal No. 1998-0078
Application No. 08/478,814
mean-plus-function elements to which § 112, ¶ 6, applies. Claim 26 does not recite
sufficient structural limitations for the above means. Thus, we look to the specification for
the structure corresponding to “gas supply means” and “switching means” and equivalents
thereof to determine the scope and meaning of claim 26, the broadest claim in this
application.
We interpret the claimed “gas supply means” as the gas supply source for supplying
a gas containing either O for ashing or halogen containing gas for etching in to the
2
processing vessel. The gas supply source is illustrated in Figure 3 and described at page 11,
lines 1 to 6 of the specification, which is provided below for convenience:
A gas supply source 54 for supplying a gas containing O ,
2
used for ashing into the processing vessel 41, and a gas supply
source 55 for supplying a halogen-containing gas used for light
etching into the processing vessel 41 are connected to the gas
supply port 42 via a gas line 53.
We also interpret the claims “switching means” as the controller 61, valve 57, valve
58, and the mass flow controllers 59 and 60 as illustrated in Figure 3 and described at page
11, line 24 to page 12, line 2, of the specification, which is provided below for
convenience:
The controller device 61, upon reception of the information, outputs
control signals to the valves 57 and 58, and the mass flow controllers
59 and 60 so as to switch the components and the flow of gas supplied
into the processing vessel 42 from the ashing use to the light etching
use.
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