Appeal No. 1998-1632 Page 8
Application No. 08/536,045
APPENDIX
1. A method of forming a magneto-resistance effect
thin film for a magneto-resistance effect type magnetic
head, in which a single unit layer of an Ni-Fe alloy thin
film layer or a superlattice thin film layer of Ni and Fe
is formed as a unit layer or a plurality of said unit
layers are laminated, comprising the step of:
providing a base material for forming thereon a thin
film for a magneto-resistance effect type magnetic head;
forming said thin film for said magneto-resistance
effect type magnetic head by sputtering Ni and Fe on said
base material from an Ni target and an Fe target disposed
separately while said Ni target and said Fe target are
both being rotated relatively to said base material.
2. The method according to claim 1, wherein said
unit layer has a thickness of less than 10Å.
3. The method according to claim 1, wherein an
amount of NI in a composition of the whole of said
magneto-resistance effect thin film formed of said Ni-Fe
alloy thin film layer or said superlattice layer of Ni
and Fe is selected in a range of from 75 to 90 weight %.
4. A method of manufacturing a magneto-resistance
effect magnetic head comprising the steps of:
providing a base material for forming thereon a thin
film for a magneto-resistance type magnetic head;
forming said thin film of Ni-Fe by sputtering Ni and
Fe on said base material from an Ni target and an Fe
target disposed separately while said Ni target and said
Fe target and said base material are relatively rotated.
5. The method according to claim 4, wherein said
unit has a thickness of less than 10Å.
6. The method according to claim 4, wherein an
amount of Ni in a composition of said thin film is
selected in a range of from 75 to 90 weight %.
7. A method of manufacturing a magneto-resistance
effect magnetic head comprising the steps of:
providing a base material for forming thereon a thin
film for a magneto-resistance type magnetic head;
Page: Previous 1 2 3 4 5 6 7 8 9 10 11 Next
Last modified: November 3, 2007