Appeal No. 1998-2405
Application 08/351,093
material, to prepare the sample for observation which detects
electron or ion beam radiation penetrating the sample, the
observation generally being carried out using a transmission
electron microscope (specification, page 1, lines 1-5). Claim
1 is illustrative:
1. A method for preparing a sample for observation, the
sample having a surface, said method comprising:
delivering a spray of an organic compound vapor to a
first area of the sample surface while scanning the first area
with a focussed ion beam to decompose the organic compound
into a layer having a mask function, wherein the layer covers
the first area and at least part of the first area has a
width; and
delivering a spray of an etching gas to a second area of
the sample surface while irradiating the second area with an
ion beam in order to remove material from the sample surface
at the second area, thereby leaving an isolated portion of the
sample, wherein the second area includes at least part of the
first area, the layer covering the first area prevents removal
of material from the sample surface in the first area and the
isolated portion has a thickness equal to the width of the
part of the first area.
THE REFERENCES
Jelks et al. (Jelks) 4,612,085 Sep. 16,
1986
Kaito et al. (Kaito) 4,876,112 Oct. 24,
1989
Seki et al. (Seki) 5,145,554 Sep. 8,
1992
Franke et al. (Franke) 5,378,316 Jan. 3,
1995
2
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