Appeal No. 2000-0239 Page 6 Application No. 08/839,843 following limitations: “directly on, and in physical contact with, said sublayer: sections of high conductivity metal on said sublayer; and coplanar sections of said diffusion barrier metal interspersed between said sections of high conductivity metal. . .” Similarly, independent claims 6 and 10 specify in pertinent part the following limitations: “an overlayer of said diffusion barrier metal on said conductive and said diffusion barrier metal sections. . . .” Also similarly, independent claim 12 specifies in pertinent part the following limitations: “an overlayer of said first diffusion barrier metal on said sections of high conductivity and said sections of said second diffusion barrier metal. . . .” Further similarly, independent claim 13 specifies in pertinent part the following limitations: “directly on, and in physical contact with, said sublayer: sections of high conductivity metal interspersed between said protruding sections. . . .” Accordingly, independent claims 1, 3, 6, 10, 12, and 13 require inter alia a layer of diffusion barrier metal lying under, lying over, or lying both under and over interspersedPage: Previous 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 NextLast modified: November 3, 2007