Appeal No. 2000-1608
Application 08/953,998
ejection angle data N is used to calculate a continuous vertical
distribution function F(2) shown in Fig. 3A. Then, sets of two-
dimensional uniform random numbers are used to simulate an
ejection. The first random number designates a value of the
vertical angle 2 and the second random number represents a value
of the function F(2); these random numbers are plotted as the
point A in Fig. 3A. The sets that fall inside the shaded area
are accepted as events of ejection that are likely to occur at
angles of 2 indicated by the first random numbers. The
horizontal angle N is assumed to be a uniform random number.
Tracks of sputtered particles are calculated using the values of
the vertical angles and horizontal angles determined using the
uniform random numbers. Using the distribution function F( 2)
requires much less calculation than the MD method.
Claim 1 is reproduced below.
1. A method of simulating a sputtering process,
wherein an ejected direction of a particle from a target is
designated in polar coordinates ( 2,N), a vertical angle 2
denoting an angle of said ejected direction with respect to
a z-axis that is defined at an incident point of a
bombarding particle on a surface plane of said target and is
directed perpendicularly to said surface plane of said
target and a horizontal angle N denoting an angle of an
intersection line with respect to an x-axis, an xy-plane
being said surface plane of the target, x-axis being an
arbitrarily defined axis on said xy-plane, and said
intersection line being an intersection of a plane that
includes both said z-axis and said ejected direction with
said xy-plane, comprising:
a first step of calculating a direction-dependent
distribution of ejected particles from said target;
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