Ex parte SASAKI et al. - Page 8




           Appeal No. 2001-0118                                                                
           Application No. 09/013,927                                                          

           and which uses a sputter chamber pressure far below those                           
           disclosed by Barnes and claimed by the appellants (e.g., see                        
           lines 37-41 in column 13 of Lubbers).                                               
                The relatively high pressures disclosed by Barnes (to                          
           effect sputtering with high ionization) in comparison with the                      
           relatively low pressure disclosed by Lubbers (to effect                             
           sputtering without any significant ionization) compel a                             
           determination that the examiner’s proposal to modify Barnes so                      
           as to result in “traditional rf sputtering” (i.e., sputtering                       
           without significant ionization) would result in use of a                            
           sputter chamber pressure (e.g., the pressure of Lubbers) far                        
           below those required by the independent claim on appeal.                            
           Therefore, even assuming an artisan with ordinary skill would                       
           have been motivated to modify Barnes in order to obtain                             
           “traditional rf sputtering,” such a modification would result                       
           in a method different from the appellants’ claimed method in                        
           at least one respect (i.e., sputter chamber pressure).                              
                For this reason alone, we cannot sustain the examiner’s                        
           section 103 rejection of claim 2 over Barnes in view of                             
           Jeffrey, Lubbers and Fritsche or his corresponding rejection                        



                                              8                                                





Page:  Previous  1  2  3  4  5  6  7  8  9  Next 

Last modified: November 3, 2007