The opinion in support of the decision being entered
today was not written for publication in a law journal
and is not binding precedent of the Board.
Paper No. 16
UNITED STATES PATENT AND TRADEMARK OFFICE
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
Ex parte WENGE YANG, LEWIS SHEN, and MARK CHANG
Appeal No. 2001-0607
Application No. 09/244,429
ON BRIEF
Before KRASS, FLEMING and LALL, Administrative Patent Judges.
KRASS, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on appeal from the final rejection of
claims 18-20 and 22-25. Claims 1-17 have been withdrawn as being
directed to a non-elected invention.
The invention relates to semiconductor structures. More
particularly, the invention relates to etching a multilayered
structure for submicron memory devices where the semiconductor
-1–
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