Ex Parte YANG et al - Page 14




          Appeal No. 2002-0974                                                        
          Application 09/332,745                                                      

          :m on a silicon wafer. Claim 28 is not limited to any particular            
          epitaxial layer but is directed to "an epitaxial layer."                    
               Similarly, at pages 15 and 16 of their brief appellants                
          recite the various limitations in claim 34 (epitaxial layer                 
          thickness, heating and cooling, surface condition of the wafer,             
          etcetera) and then proclaim that the office has not made out a              
          prima facie case of obviousness with respect to the subject                 
          matter claimed in claim 34. We find appellants' "argument" lacks            
          adequate specificity to establish what constitutes the error in             
          the proffered rejection. Suffice it to say that, for reasons                
          expressed fully above, we find the examiner has made out a prima            
          facie case of obviousness with respect to the subject matter of             
          claim 34.                                                                   
               Having concluded that the examiner has made out a prima                
          facie case of obviousness with respect to the appealed subject              
          matter, it is necessary for us to consider appellants' rebuttal             
          evidence, if any, and to reconsider the prima facie case anew in            
          light of all the evidence.  In re Piasecki, 745 F.2d 1468, 1472,            
          223 USPQ 785, 788 (Fed. Cir. 1984). However, appellants have                
          neither presented any rebuttal evidence nor advanced any                    
          arguments with respect to any probative showing of surprising or            
          unexpected results represented by objective evidence in this                

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