Appeal No. 2001-2039
Application No. 09/110,207
identify the elements in the prior art, but also show “some
objective teaching in the prior art or that knowledge generally
available to one of ordinary skill in the art would lead the
individual to combine the relevant teachings of the references.”
In re Fine, 837 F.2d 1071, 1074, 5 USPQ2d 1596, 1598 (Fed. Cir.
1988).
A review of the applied prior art confirms that Nagasaki
relates to a wafer support member in which a voltage is applied
between an internal electrode in a base body of the support
member and an attraction object, such as a wafer, to generate an
electrostatic attraction force (col. 7, lines 66 through col. 8,
line 9). However, as contended by the Examiner, the claimed
insulating layer and the second electrode provided in a recess in
the first electrode are absent in Nagasaki. Logan, on the other
hand, discloses an electrostatic chuck having a recess
configuration with two electrodes separated by an insulating
layer wherein a voltage applied between the electrodes generates
an electric field for producing an attractive force between the
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