Appeal No. 2001-2388
Application 09/151,948
THE INVENTION
The appellant claims a method for making a liquid crystal
display integrated circuit device. Claim 1 is illustrative:
1. A method of fabricating a liquid crystal display
integrated circuit device comprising:
providing semiconductor device structures in and on a
semiconductor substrate wherein said semiconductor device
structures are covered by an insulating layer;
patterning a trench into said insulating layer and a via
opening within said trench through said insulating layer to one
of said underlying semiconductor device structures;
depositing a metal layer overlying said insulating layer and
within said trench and said via opening;
polishing away said metal layer overlying said insulating
layer leaving said metal layer within said trench to form a metal
pixel and within said via opening to form an interconnect between
said metal pixel and said underlying semiconductor device wherein
the top surface of said substrate is planarized;
depositing a passivation layer overlying said top surface of
said substrate;
forming a liquid crystal material layer overlying said
passivation layer and;
attaching a second semiconductor substrate overlying said
liquid crystal material layer to complete the fabrication of said
liquid crystal display integrated circuit device.
THE REFERENCES
Huang et al. (Huang) 5,635,423 Jun. 3, 1997
Jeong 5,960,317 Sep. 28, 1999
(filed Sep. 26, 1997)
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