scope of the count with respect to two frames that are "dynamically isolated" when that term is
correctly interpreted.
A machine frame which ... sgpports in that order a radiation source
Lee claim 4 recites a machine frame which, seen parallel to a vertical Z-direction,
supports in that order a radiation source, a mask holder, a focusing system, etc. Van Engelen's
only argument, with respect to the '558 application, is that the illuminator 90 shown in Fig. 2 and
Fig. 5, does not indicate that there is any means of support for the illuminator or a description of
any particular order for such support with respect to any other element of the illustrated device
(motionatl7). Van Engelen fails to sufficiently discuss the remaining '558 application in any
manner to make its case.
Lee '558 Fig. 2 shows an illuminator 90 above reticle 24. Central aperture 30, below the
reticle allows for the passage of light to the projection lens below. The order of the elements are
described throughout the '558 application. (See for example, page 5, lines 22-29). It is clear
from the '558 specification that the illuminator 90 is above all of the other elements. That is,
when seen parallel to a vertical Z-direction, the radiation source is the first in the order of
elements.
The van Engelen '558 specification does not explicitly state that the illuminator is
supported by a first frame, i.e., the machine frame. However, when considering the entire '558
specification, it is apparent that the elements shown in the figures must be supported by either
one of two frames, and that the radiation source (illuminator) is supported by the machine frame.
As correctly noted by van Engelen, the term "support" means to bear the weight of an
object. Thus, the machine frame need only bear the weight of the illuminator. It need not
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