detail and should have discussed what one of ordinary skill in the art would have understood
from reading the specification and looking to the figures. Satisfaction of the written description
requirement does not require the description of claim terms to be ipsis verbis antecedent in the
originally filed application. In re Lukach, 442 F.2d 967, 969,169 USPQ 795, 796 (CCPA 1971).
It is what the specification would have conveyed to one of ordinary skill in the art as to what the
inventors possessed at the time of the invention. Based on the record before us, the '558
specification supports a radiation source supported by a machine frame.
A stationM part of the drive unit fastened to the first frame
Lee claim 4 recites a drive unit comprising a stationary part which is fastened to a second
frame of the positioning device. Van Engelen argues that Lee '558 fails to provide support for
any stationary part of the drive unit that isfastened to a second frame. Van Engelen provides no
meaningful explanation as to why the '558 application fails to describe a stationary part of the
drive unit that is fastened to a second frame, and thus has failed to meet its burden to demonstrate
that the '558 application fails to describe the claimed feature. Accordingly, we need not
independently make the determination as to whether the '558 application does describe a
stationary part of a drive unit that is fastened to the second frame.
hi any event, we note that the '558 application describes a reticle stage drive unit' that
includes X axis linear motors comprised of magnetic tracks 62A and 62B and magnetic coils
60A and 60B and Y axis linear motors comprised of magnetic tracks 70A and 70B and coils 68A
' We recognize that the '558 application describes an embodiment of a reticle drive unit
for moving a reticle stage and not a wafer stage drive unit for moving a wafer stage. However,
the '558 application states in at least two places that the embodiment described maybe used for
a wafer stage for processing a wafer (substrate) (Ex. 2036, at 3, lines 21-26 and 5, lines 31-33).
-24-
Page: Previous 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 Next
Last modified: November 3, 2007