and 68B. The magnetic tracks 70A and 70B are mounted on window frame guide members 40C
and 40D respectively. The motor coils 68A and 68B are mounted on the reticle stage 10. The
magnetic tracks 62A and 62B are mounted on fixed guides 64A and 64B respectively. The coils
60A and 60B are mounted on guide members 40A and 40B respectively. The guide members
40A-40D and the fixed guide members 64A and 64B are fastened to support structure 80 and
114A-114D (first frame). The drive tracks cooperate with the drive coils to move the reticle
stage. At least the drive tracks satisfy the limitation of a stationary part of the drive unit which is
fastened to a first frame as follows.
There are two parts to a motor: a stator and a rotor. A stator is defined as the stationary
part of a machine, such as a motor, and the rotor is defined as the rotating part (Webster's H New
Riverside University Dictionary, Copyright 1988 (definitions attached)). A linear motor is
defined as an electric motor that has in effect been split and unrolled into two flat sheets, so that
the motion between the rotor and stator is linear rather than rotary. (McGraw-Hill Dictionary of
Scientific and Technical Terms - Fifth Edition, copyright 1994 (definition attached)). In the
context of a linear motor, the rotor does not rotate, but rather moves in a linear fashion. The
stator is that part of the motor which remains stationary relative to the rotor.
Lee describes a linear motor where the stationary parts of the motor, or the stator of the
motor is understood to be the X and Y drive tracks. Thus, the '558 application describes a
stationary part of the drive unit. Furthermore, the X and Y drive tracks, or stators are attached to
the first frame 80, 114A-1 14D through the guides, and are thus, fastened to the first frame.
From the above, the '558 application describes an enabling embodiment within the scope
of the count. Based on the record before us, van Engelen has failed to direct us to evidence that
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