The opinion in support of the decision being entered today was
not written for publication and is not precedent of the Board.
UNITED STATES PATENT AND TRADEMARK OFFICE
____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
____________
Ex parte HUNG YIP NG
___________
Appeal No. 2005-0585
Application No. 09/821,478
____________
ON BRIEF
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Before GARRIS, OWENS, and PAWLIKOWSKI, Administrative Patent
Judges.
PAWLIKOWSKI, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision under 35 U.S.C. § 134 from the
examiner’s final rejection of claims 1, 3, 4-8, 10-14, and 16-
20.
Claims 1 and 4 are representative of the subject matter on
appeal, and are set forth below:
1. A method of forming a semiconductor device,
comprising:
lithographically patterning a structure having a
first critical dimension, wherein said structure
includes nested features and an isolated feature;
etching said structure with an O2-containing
material to trim said first critical dimension to a
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