The opinion in support of the decision being entered today was not
written for publication and is not binding precedent of the Board.
UNITED STATES PATENT AND TRADEMARK OFFICE
__________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
__________
Ex parte MICHIHIKO YANAGISAWA, KAZUYUKI TSURUOKA
and CHIKAI TANAKA
__________
Appeal No. 2005-0900
Application No. 10/098,588
__________
ON BRIEF
__________
Before HAIRSTON, KRASS and JERRY SMITH, Administrative Patent
Judges.
JERRY SMITH, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on the appeal under 35 U.S.C. § 134
from the examiner’s rejection of claims 2, 3, 8 and 9, which
constitute all the claims pending in the application.
The disclosed invention pertains to a local dry etching
apparatus for removing unevenness on a surface of a semiconductor
wafer.
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