Appeal No. 2006-1663
Application No. 09/871,883
surface and the outer surface of said upper edge of said lower
conductive liner in liner-to-liner contact regions.
25. An interconnect structure, comprising:
a lower level wire in a dielectric layer, said lower level wire
having a side and a bottom and one or more integral extensions each
extension having a side and a bottom and extending laterally from the
side of said lower level wire, said lower level wire and extensions
comprising a lower core conductor and an lower conductive liner, said
lower conductive liner on the side and the bottom of said lower level
wire and said extensions, said lower conductive liner having an upper
edge having an inner surface, an outer surface, and a top surface, the
top surface of said upper edge substantially coplanar with a top
surface of said dielectric layer;
an upper level wire having a side and a bottom and an array of
vias integrally formed in the bottom of said upper level wire, each via
of said array of vias having a side and a bottom, said upper level wire
and each via comprising an upper core conductor and an upper
conductive liner, said upper conductive liner on the side and the
bottom of said upper level wire and on the side and bottom of each
via, at least a portion of the bottom each via extending below a top
surface of said extensions of said lower wire level; and
said upper conductive liner on the bottom of each said via of a
first portion of said array of vias in contact with said lower core
conductor of said lower level wire and a second portion of said array
of vias in contact with said lower core conductor of said extensions
and also in contact with both the inner surface and the outer surface of
said upper edge of said lower conductive liner of said extensions in
liner-to-liner contact regions.
30. An interconnect structure, comprising:
a lower level wire having a side and a bottom, said lower level
wire comprising a lower core conductor and a lower conductive liner,
said lower conductive liner on the side and the bottom of said lower
level wire;
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