Appeal 2006-2959
Application 10/066,277
substantially automatically generates a report setting forth the analysis
results. (Specification 8, l. 32- 9, l. 3).3
Esrig teaches an emission microscopy system for obtaining a global
view of an integrated circuit (IC) or Device Under Test (DUT). (Abstract).
Particularly, Esrig discloses illuminating and stimulating the DUT to obtain
images of defects wherever located in the chip. According to Esrig, each
packaged IC device, with the top removed, is placed in a socket through
which a computer controls I/O pins connected to a DC voltage.4 (col. 2, ll.
59-64). Upon detecting through the microscope an extremely faint light
(defect bright spot) in the DUT, a computer operator can direct the camera to
take a picture of the defect bright spot. Alternatively, the operator can direct
the microscope to intensify or magnify the defect bright spot to further
examine it. (col. 5, ll. 9-27). Esrig further teaches a two stage filtering
process for separating the bright spots from noise spots to identify the areas
of the defects. (Id., ll. 46-56.)
Jaber discloses a system for semi-automatically testing and inspecting
concrete. (Abstract). A computer operates and controls a computer driven
stage containing the concrete sample under the microscope. (col. 3, ll. 4-8,
ll. 20-25). The computer automatically records the linear traverse of the
entire traverse pattern. (col. 4, ll. 14-16, ll. 33-34). An operator customizes
3 Appellants’ Specification, at page 9, indicates that the computer program
utilized to substantially automate the preferred embodiment of the present
invention is considered to be within the ability of one of ordinary skill in the
art. Further, the Specification indicates that the substantial automation
program is achieved by minimizing human interaction throughout the sample
evaluation process.
4 Generally, ICs emit extremely faint lights as current flows through a
damaged dielectric. (col. 1, ll. 9-11).
6
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