Ex Parte Wang et al - Page 1

                 The opinion in support of the decision being entered today was not written                   
                          for publication and is not binding precedent of the Board.                          

                        UNITED STATES PATENT AND TRADEMARK OFFICE                                             
                             BEFORE THE BOARD OF PATENT APPEALS                                               
                                         AND INTERFERENCES                                                    
                               Ex parte YUCHUN WANG, RAJEEV BAJAJ                                             
                                         and FRED C. REDEKER                                                  
                                             Appeal 2006-3166                                                 
                                           Application 09/843,582                                             
                                          Technology Center 3700                                              
                                          Decided:  March 8, 2007                                             
                Before BRADLEY R. GARRIS, JEFFREY T. SMITH, and                                               
                CATHERINE Q. TIMM, Administrative Patent Judges.                                              
                GARRIS, Administrative Patent Judge.                                                          

                                         DECISION ON APPEAL                                                   
                                       STATEMENT OF THE CASE                                                  
                      Appellants appeal under 35 U.S.C.  134 from the final rejection of                     
                claims 14, 19, and 20.  We have jurisdiction over the appeal pursuant to                      
                35 U.S.C.  6(b).                                                                             
                      Appellants invented a scrubber or brush apparatus for removing                          
                metallic particles from the surface of semiconductor substrates after                         
                chemical mechanical polishing of the substrates (Specification 1).  The                       

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