Appeal 2006-3166
Application 09/843,582
scrubber or brush has complexing agents coupled to the surface of the
scrubber or brush to “pick up” metal ions or metal oxides without etching
the metal lines on the substrate (Specification 2). The complexing agents
may be chemically grafted on the brush, physically blended with the brush
materials, or the brush may be made of a homogeneous complexing polymer
(Specification 2).
Claims 14, 19 and 20, the only claims on appeal, are illustrative:
14. A brush apparatus comprising:
a scrubber brush having:
a surface adapted to contact a surface of a substrate to be
scrubbed; and
a complexing agent coupled to the scrubber brush surface,
the complexing agent adapted to chemically bond to metal particles.
19. An apparatus comprising:
a scrubber brush comprised of a homogeneous material
comprising a complexing agent adapted to chemically bond to metal
particles, and having a surface adapted to contact a surface of a substrate to
be scrubbed.
20. A scrubber comprising:
a substrate support adapted to support a substrate;
a brush coupled so as to contact a substrate supported by
the substrate support, the brush having:
a surface adapted to contact a surface of a substrate to be
scrubbed; and
a complexing agent coupled to the brush surface, the
complexing agent adapted to chemically bond to metal particles; and
a mechanism adapted to generate relative movement
between the substrate and the brush.
2
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