Appeal No. 2006-3405
Application No. 10/631,858
BACKGROUND
The invention relates to a dielectric device in which constituent elements in
an electrode surface layer that abuts a dielectric film are terminated by halogen
(fluorine) atoms. According to appellants, the arrangement provides for superior
characteristics with respect to dielectric devices in the prior art. Claim 1, the sole
independent claim on appeal, is reproduced below.
1. A dielectric device comprising:
such a first electrode layer that constituent elements located on its
surface are terminated by halogen atoms; and
a dielectric film formed on the surface of said first electrode layer
terminated by said halogen atoms,
wherein said first electrode layer contains at least one element selected
from a group consisting of Pt, Ir, Pd and Ru and said halogen atoms are
fluorine atoms.
The examiner relies on the following references:
Fukaya et al. (Fukaya) US 4,581,099 Apr. 8, 1986
Yamazaki et al. (Yamazaki) US 6,046,469 Apr. 4, 2000
Kirlin et al. (Kirlin) US 6,320,213 B1 Nov. 20, 2001
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