Appeal 2007-0127
Application 09/749,916
1 The results of his testimony are presented as Appendix A to his
2 declaration, which we reproduce as Table 2 below (slightly reduced):
3 Table 22:
4
5 Mr. Hubacek testifies that the center-to-edge temperature gradient
6 decreases as the showerhead electrode thickness increases. (Hubacek
7 Declaration, p. 2, ll. 9-11).
8 We find this testimony to be unpersuasive as to the issue of
9 obviousness.
10 First, we observe that Mr. Hubacek testified that the center-to-edge
11 gradients for thicknesses of 0.15 inch, 0.18 inch, and 0.35 inches were
12 “modeled” based on temperature measurements made for the showerhead
13 electrode having a thickness of 0.25 inches. (Hubacek Declaration, p. 2, ll.
2 Table 2 illustrates a graphical comparison of center to edge temperature
gradient with silicon thickness at different wattages.
17
Page: Previous 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 Next
Last modified: September 9, 2013