Appeal 2007-0127
Application 09/749,916
1 Moreover, no credible evidence or argument is presented showing that
2 the limited evidence offered is representative of the entire range. As a
3 consequence, the evidence is not commensurate in scope with the claimed
4 subject matter.
5 Even were the evidence commensurate in scope with the claimed
6 subject matter, we find it further unpersuasive for the following reasons.
7 (a) The Center-To-Edge Temperature Gradient
8 Mr. Hubacek testifies that he fabricated four showerhead electrodes of
9 different thicknesses which each had a number of gas passages in them and a
10 range of resistivities. He testifies further that he applied different wattages
11 to them. The variables of his testimony are assembled in Table 1 below:
12 Table 11:
13
Electrode Thickness Resistivity Gas Passages
(inches) (ohm-cm) (number)
1 0.15 0.005-0.02 3249
2 0.18 0.005-0.02 3249
3 0.25 0.005-0.02 3249
4 0.35 0.005-0.02 2437
14
1 Table 1 illustrates electrode variables for four electrodes, including
thickness, resistivity, and gas passages in columnar format.
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Last modified: September 9, 2013