Appeal 2007-0465
Application 10/146,813
AFFIRMED-IN-PART
eld
Attachment:
Xiaolan Chen and S.R.J. Brueck, Imaging interferometric lithography: A
wavelength division multiplex approach to extending optical lithography,
J. Vac. Sci. Technol. B 16(6), Nov./Dec. 1998, pp. 3392-3397.
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