Appeal 2007-2483
Application 09/899,183
THE CLAIMS
Representative claim
Claims 15-18 are pending. Mitsubishi does not provide separate
arguments for the claims, instead providing arguments for both independent
claims together and no separate argument for the two dependent claims.2
Following the Board rule governing appeal briefs, we select claim 15 as
representative of the claims on appeal. The remaining claims stand or fall
with the rejection of claim 15.3
Claim 15 defines the subject matter of the invention as follows:4
15. A vaporizing device for vaporizing chemical vapor
deposition (CVD) source materials comprising:
a vaporizer for vaporizing CVD source materials by
heating, the vaporizer including a chamber having a heat
conductive chamber wall with an inlet for introducing the CVD
source materials into the chamber;
a spray nozzle having a first end located to spray a CVD
source material into the chamber through the inlet;
a plate having at least one portion thinner than the
chamber wall, contacting and locating the spray nozzle relative
to the inlet to spray CVD source materials into the chamber, the
plate limiting thermal conduction from the chamber wall,
thereby thermally insulating the spray nozzle from the chamber
wall;
a cooling block in physical contact with a portion of the
spray nozzle adjacent the plate and surrounding the spray
nozzle for conducting heat from and cooling the spray nozzle;
and
a heat conduction restricting region between the cooling
block and the chamber wall, thermally isolating the spray
nozzle and the cooling block from the chamber wall.
2 Appellant's Appeal Brief (Br.) 3-7.
3 37 C.F.R. § 41.37(c)(1)(vii).
4 From Mitsubishi's claim appendix, Br. 8.
2
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