Appeal 2007-2483
Application 09/899,183
The Zhao patent
The Zhao patent relates to an apparatus and process for vaporization
of liquid precursors in a CVD system.23 The embodiments shown in FIG. 4
(right, color added) and FIG. 5
(below, left, color added) show a
neck 142 (green) between the
upstream components and the
downstream components. The
neck 142 is narrower than the
walls of the expansion chamber and
thermally isolates the upper and lower
components. Zhao explains that since
the upper components are cooled and
the lower components are heated, the
neck 142 prevents heat loss and the
23 Zhao 1:13-15 and 3:65-66.
8
Page: Previous 1 2 3 4 5 6 7 8 9 10 11 12 13 Next
Last modified: September 9, 2013