Appeal 2007-2501
Application 10/026,917
1 12. During the steps of moving the arm 20 (and wafer on top of plate
2 38), the power supply remains on and connected so that a charge is
3 maintained to keep the substrate chucked to plate 38 (Hwang 5:28-46).
4 D. Principles of Law
5 35 U.S.C. § 102
6 “A person shall be entitled to a patent unless….the invention was
7 patented or described in a printed publication in this or a foreign country or
8 in public use or on sale in this country, more than one year prior to the date
9 of the application for patent in the United States” 35 U.S.C § 102(b).
10 To anticipate a claim, a prior art reference must disclose every
11 limitation of the claimed invention, either expressly or inherently.
12 Verdegaal Bros. Inc., v. Union Oil Co., 814 F.2d 628, 631, 2 USPQ2d 1051,
13 1053 (Fed. Cir. 1987).
14 E. Analysis
15 The Examiner finally rejected independent claims 1 and 11 and
16 dependent claims 6, 7, 9, and 15 as being anticipated under 35 U.S.C.
17 § 102(e) by Hwang. The Examiner relied on Hwang to teach “without any
18 additional external power supply to recharge the transportable electrostatic
19 chuck during long or several process steps or operation steps,” recited in
20 both claim 1 and claim 11. The Examiner indicated that the steps of moving
21 the arm 20 and rapidly moving the arm to the process chamber are
22 performed under a single power application and meet the limitation (FF 7).
23
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