Ex parte SATOH et al. - Page 11




          Appeal No. 95-2599                                                          
          Application 07/983,931                                                      


          prior art, the claim is unpatentable even though the prior                  
          product was made by a different process.”                                   
               On page 5 of the reply brief, Appellants argue that claim 25           
          recites etch rates that are physical properties of each portion             
          of the shaped conductive layer.  However, as shown above, we have           
          found that the Examiner has met the burden that Sato either                 
          inherently teaches or that it would have been obvious to those              
          skilled in the art in view of the Sato teachings to provide "a              
          shaped conductive layer ... having a upper portion and a lower              
          portion ... with the lower portion having a faster etch rate as             
          compared with an etch rate of the upper portion under the same              
          etching conditions" as recited in Appellants' claim 25.  A prima            
          facie case is a procedural tool which means not only that the               
          evidence of the prior art would reasonably allow the conclusion             


          the examiner seeks, but also that the prior art compels such a              
          conclusion if the Appellants produce no evidence or argument to             
          rebut it.  In re Spada, 911 F.2d 705, 707 n.3, 15 USPQ2d 1655,              
          1657 n.3 (Fed. Cir. 1990).                                                  
               On page 15 of the brief, Appellants argue that Sato fails to           
          teach that the lower portion of the shaped conductive layer                 
          includes a section having tapered walls as recited in Appellants’           

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