Appeal No. 95-1009
Application 07/858,632
6. A method of fabricating an electronic device, of
the type including a smoothing process achieved by polishing
with a polishing member, wherein improvement comprises:
forming a conductive polish-stop layer over a
substrate;
effecting said smoothing process; and
during said smoothing process, monitoring the
electric resistance between the substrate and a surface of the
polishing member contacting the substrate, thereby determining
a polish end according to changes in electric resistance.
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