Appeal No. 1997-3515
Application No. 08/390,226
The appellants’ invention is directed to a transport
system for wafer processing. The claims before us on appeal
have been reproduced in an appendix to the Brief.
THE REFERENCES
The references relied upon by the examiner to support the
final rejection are:
Okano et al. (Okano) 4,526,643 Jul. 2,
1985
Belna 4,624,617 Nov. 25,
1986
Kita et al. (Kita) 4,766,993 Aug. 30,
1988
Kemmerer et al. (Kemmerer) 4,793,911 Dec. 27,
1988
Kawaguchi et al. (Kawaguchi) 4,800,818 Jan.
31, 1989
Bloomquist et al. (Bloomquist) 4,834,855 May 30,
1989
Norman 5,110,249 May 5,
1992
THE REJECTIONS
The following rejections stand under 35 U.S.C. § 103:1
(1) Claims 1-4, 6-13 and 15-19 on the basis of either
Norman or Bloomquist in view of Belna, Kita and Kawaguchi.
(2) Claims 5, 14 and 20-23 on the basis of either Norman
1A rejection of the claims as being unpatentable over
Flint in view of Belna, Kita and Kawaguchi was withdrawn in
the Examiner’s Answer.
2
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