THIS OPINION WAS NOT WRITTEN FOR PUBLICATION
The opinion in support of the decision being entered today
(1) was not written for publication in a law journal and
(2) is not binding precedent of the Board.
Paper No. 16
UNITED STATES PATENT AND TRADEMARK OFFICE
_____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
_____________
Ex parte CHEN-HUA D. YU
_____________
Appeal No. 1997-3635
Application No. 08/498,357
______________
ON BRIEF
_______________
Before FLEMING, BARRETT, and BARRY, Administrative Patent
Judges.
FLEMING, Administrative Patent Judge.
This is a decision on appeal from the rejection of claims
1 through 5, 8 through 12, 14 through 16, and 19. Claim 13
has been canceled. The rejection of claims 6, 7, 17, 18, and
20 is not appealed.
Appellant’s invention is generally directed to a method
for forming a barrier metallization with low contact
resistance and in particular, to the protection of a barrier
1
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