Ex parte AZUMA et al. - Page 5




               Appeal No. 1999-2712                                                                       Page 5                    
               Application No. 08/165,082                                                                                           


               See id..; In re Hedges, 783 F.2d 1038, 1039, 228 USPQ 685, 686 (Fed. Cir. 1986); In re                               

               Piasecki, 745 F.2d 1468, 1472, 223 USPQ 785, 788 (Fed. Cir. 1984); and In re Rinehart, 531                           

               F.2d 1048, 1052, 189 USPQ 143, 147 (CCPA 1976).                                                                      

                       We consider first the rejection of claim 1, the only independent claim in the application,  based            

               on the teachings of Koyama and Brandmayr.  The examiner asserts (answer, page 3) that Koyama                         

               teaches a stacked capacitor intended for use in an integrated circuit wherein a layer of BST is                      

               interposed between a pair of electrodes.  Koyama discloses the thickness of the BST layer to be 70 nm                

               - 200 nm. The examiner notes that id., “No micrograph of barium strontium titanate is shown, however,                

               nor is there any explicit discussion of the grain size in the text of the article.”  To make up for this             

               deficiency in  Koyama, the examiner turns to Brandmayr for a teaching of a dielectric material formed                

               of BST, and having a grain size less than 0.1 micron (100 nanometers).  As stated by the examiner,                   

               Brandmayr teaches (col. 2, lines 1-24) the advantages of increased dielectric constant, increased                    

               dielectric strength and decreased porosity.                                                                          

                       We note that appellants’ specification (page 1) discloses that BST was known to be useful in                 

               making integrated circuit thin film capacitors having high dielectric constants, and refers to  Koyama as            

               an example of an integrated circuit thin film capacitor utilizing BST as a dielectric material.  The                 

               specification goes on to state id., that “conventional processes, while useful in conventional silicon               

               technology, when used in combination with capacitors that use metal oxides, such as BST, as the                      









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