Appeal No. 1998-0038
Application No. 08/236,780
The appellants also seem to argue that Champetier
contains no teaching or suggestion of a two-step process
wherein contaminants are removed by reactive as well as non-
reactive plasmas pursuant to appealed independent claims 5 and
15. This argument is unpersuasive. As noted earlier and
correctly pointed out by the examiner, Champetier expressly
teaches removing contaminants by physical as well as chemical
action (e.g., again see lines 54-63 in column 5).
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