Appeal No. 1998-1578
Application No. 08/543,827
the platinum layers 126 and 130 can function as electrode
plates. (Column 3, lines 54-55; column 4, lines 9-10.)2
Regarding the steps for making the structure, Larson
teaches that the structure is constructed in an evacuation
chamber, preferably in two separate evacuations or “pump
downs,” wherein the bottom electrode and the dielectric layer
are constructed during the first pump down and the top
electrode is constructed during the second pump down. (Column
3, lines 26-32.) Also, Larson states that various “known
techniques,” including but not limited to sputtering, can be
used for depositing each of the layers. (Column 4, lines 28-
36.)
The examiner admits that Larson “fails to teach annealing
the titanium/titanium nitride layers, i.e. barrier layers,
before depositing the dielectric and second electrode[s].”
(Examiner’s answer, page 4.) In addition, we note that Larson
lacks any teaching as to the maximum anneal temperature-
2The appellants’ specification states that platinum is
one of the preferred materials for the electrodes. (P. 6, ll.
23-25.)
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