Appeal No. 1998-1635
Application No. 08/470,596
exhausting the reaction chamber to establish a predetermined pressure in the
chamber; and
holding a substrate located substantially at said position in the reaction
chamber on a holder, wherein the strength of the magnetic field decreases along a
line extending through said substrate in the direction of propagation of the
microwaves.
As evidence of obviousness, the Examiner relies on the following
references:
Sirtl 3,661,637 May 9, 1972
McNeilly et al. (McNeilly) 4,047,496 Sept. 13, 1977
Asmussen et al. (Asmussen) 4,727,293 Feb. 23, 1988
Yamazaki 5,266,363 Nov. 30, 1993
Hiryoshi Aida (Aida I) JP60-103098 June 7, 1985
Printed Japanese Patent Application
Hiryoshi Aida (Aida II) JP61-158898 Dec. 4, 1986
Printed Japanese Patent Application
THE REJECTIONS
The Examiner entered the following ground of rejections:
A. Claims 24, 27, 28, 30-32, 34, 38, 39 and 41-48 are rejected as being
unpatentable under 35 U.S.C. § 103(a) over the combination of Aida I, Aida II and
Asmussen. (Examiner’s Answer, page 5).
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