Appeal No. 1998-1635
Application No. 08/470,596
electrons within the hydrocarbon gas. (Asmussen, column 6, lines 38-45).
Asmussen discloses that the ECR zone position (Fig. 1, no. 35) can be varied by
increasing or decreasing the strength of the magnets. Increasing the magnetic field
strength moves the ECR surface away from the walls further into the center of the
discharge. Decreasing the magnetic strength moves the surface towards the walls
of the plasma region. (Asmussen, column 7, lines 23-31). Asmussen further
discloses variations to the ECR system which including moving the location of the
magnets. (Asmussen, column 7, line 49 to column 8, line 38).
The Examiner relies upon the combined teachings of Aida I, Aida II and
Asmussen to describe a system for generating cyclotron resonance wherein
magnetic fields are used to adjust the resonating space. The Examiner
acknowledges Adia I and Adia II do not disclose placing the substrate at a position
where ECR is established. (Answer, pg. 7, second paragraph). The Examiner
asserts that Asmussen discloses electromagnets can be used to adjust the ECR
location. (Answer, paragraph bridging pgs. 7 and 8). Thus, the Examiner
concludes it would have been prima facie obvious to one of ordinary skill in the art
to conduct the process of Aida I and Aida II with adjustable electromagnet means
in view of Asmussen. We do not agree.
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