Appeal No. 1998-2620
Application No. 08/512,033
Answer, page 5.
Ozaki discloses the problem in CVD processes that a great
amount of heat is dissipated from each of the opening ends and
uniform heating at the setting temperature can only be
obtained at a longitudinal central portion of the heating
furnace (col. 1, ll. 55-59). Ozaki solves this problem by
disposing a pair of auxiliary furnaces at each longitudinal
opening end of the main furnace to save heat calories and
provide a uniform heating region throughout the reaction
chamber (col. 1, l. 60-col. 2, l.
5
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