Appeal No. 1998-2620
Application No. 08/512,033
continuing to evacuate the reaction chamber
until the reactive gas has been substantially removed
from the reaction chamber;
then closing said gate valve and admitting air
into the reaction chamber until it is in equilibrium
with the atmosphere;
removing said end plate;
opening said bypass vent, thereby causing a
stream of air to flow from the reaction chamber towards
the pumping system; and
removing the substrate from the reaction
chamber.
A2
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