Appeal No. 1999-0542
Application 08/760,557
1992)
Sumi et al. (Sumi) 5,397,744 Mar. 14, 1995
(effectively filed Feb. 18,
1992)
M. A. Nicolet, “Diffusion Barriers in Thin Films,” Thin Solid
Films, Vol. 52, 1978, pages 415-443.
The following rejections are on appeal before us:
1. Claims 42, 44-49 and 51-57 stand rejected under 35
U.S.C. § 103 as being unpatentable over the teachings of
Yorikane taken with Us, Kikkawa, Ishii and Ong in view of
Watanabe or Nicolet.
2. Claims 43 and 50 stand rejected under 35 U.S.C. §
103 as being unpatentable over the teachings of Yorikane taken
with Us, Kikkawa, Ishii and Ong in view of Watabnabe or
Nicolet, and further in view of Sumi.
3. Claims 42, 44-49 and 51-57 stand rejected under 35
U.S.C. § 103 as being unpatentable over the teachings of Bost
and Ong in view of Watanabe or Nicolet.
4. Claims 43 and 50 stand rejected under 35 U.S.C. §
103 as being unpatentable over the teachings of Bost and Ong
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