Ex parte NAKAMURA et al. - Page 10




          Appeal No. 1999-0542                                                        
          Application 08/760,557                                                      


          provide evidence to support the rejection before us.  Instead,              
          the examiner has shifted the burden to appellants to                        
          demonstrate that the applied prior art does not have the                    
          properties of the claimed invention.  We do not believe the                 
          applied prior art is sufficient to shift the burden of                      
          persuasion to appellants.                                                   
          For these reasons, we do not sustain the examiner’s                         
          first rejection noted above.  With respect to the second                    
          rejection noted above, we find that Sumi does not overcome the              
          deficiencies of the applied prior art discussed above.                      
          Therefore, we also do not sustain the examiner’s second                     
          rejection.                                                                  
          With respect to the third rejection listed above, the                       
          examiner cites Bost as teaching a multi-layer metalization                  
          made up of an aluminum layer, a titanium layer and a titanium               
          nitride layer.  The examiner finds that Bost teaches the                    
          claimed invention except for the vacuum chamber.  As noted                  
          above, the examiner cites Ong to meet the vacuum chamber                    
          aspects of the claimed invention.  The examiner cites Watanabe              
          and Nicolet as teaching the interchangeability of refractory                
          metals and metal nitrides [answer, pages 11-15].                            
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